Granted Patent
Utility
US 5,178,987 · App. 07/348,754
Aqueous developable deep UV negative resist containing benzannelated acetic acid and novolak resin
Inventors:
Sydney George Slater, Stanley A. Ficner
Patented Case
View Patent ↗
Granted: Jan 12, 1993
Filed: Apr 24, 1989
Inventors
Sydney George Slater
Stanley A. Ficner
Assignee (at issue)
Olin Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.