IP Library › Granted Patent US 5,187,113
Granted Patent Utility
US 5,187,113 · App. 07/701,739

Field oxide termination and gate oxide formation

Inventors: Scott M. Tyson, Gary M. Wodek
Patented Case View Patent ↗
Granted: Feb 16, 1993 Filed: May 17, 1991
Inventors
Scott M. Tyson
Gary M. Wodek
Assignee (at issue)
UNITED TECHNOLOGIES CORPORATION

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Quick Facts
Patent No.
US 5,187,113
App. No.
07/701,739
Filed
1991-05-17
Granted
1993-02-16
Kind
A