Granted Patent
Utility
US 5,188,705 · App. 07/685,844
Method of semiconductor device manufacture
Inventors:
Lynwood W. Swanson, John M. Lindquist
Patented Case
View Patent ↗
Granted: Feb 23, 1993
Filed: Apr 15, 1991
Inventors
Lynwood W. Swanson
John M. Lindquist
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.