Granted Patent
Utility
US 5,188,921 · App. 07/711,351
Selected block copolymer novolak binder resins in radiation-sensitive resist compositions
Inventors:
Alfred T. Jeffries, III, Kenji Honda, Andrew J. Blakeney, Sobhy Tadros
Patented Case
View Patent ↗
Granted: Feb 23, 1993
Filed: Jun 4, 1991
Inventors
Alfred T. Jeffries, III
Kenji Honda
Andrew J. Blakeney
Sobhy Tadros
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.