Granted Patent
Utility
US 5,192,087 · App. 07/769,432
Device for supporting a wafer
Inventors:
Hideaki Kawashima, Kouhei Eguchi
Patented Case
View Patent ↗
Granted: Mar 9, 1993
Filed: Oct 2, 1991
Inventors
Hideaki Kawashima
Kouhei Eguchi
Assignee (at issue)
NIPPON STEEL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.