Granted Patent
Utility
US 5,196,377 · App. 07/747,523
Method of fabricating silicon-based carriers
Inventors:
John Wagner, Thomas Chojnacki, Delvin D. Eberlein
Patented Case
View Patent ↗
Granted: Mar 23, 1993
Filed: Aug 20, 1991
Inventors
John Wagner
Thomas Chojnacki
Delvin D. Eberlein
Assignee (at issue)
Cray Research, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.