Granted Patent
Utility
US 5,200,360 · App. 07/792,520
Method for reducing selectivity loss in selective tungsten deposition
Inventors:
Donald R. Bradbury, Gary W. Ray
Patented Case
View Patent ↗
Granted: Apr 6, 1993
Filed: Nov 12, 1991
Inventors
Donald R. Bradbury
Gary W. Ray
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.