Granted Patent
Utility
US 5,201,992 · App. 07/774,361
Method for making tapered microminiature silicon structures
Inventors:
Nicholas C. Andreadakis, Robert B. Marcus
Patented Case
View Patent ↗
Granted: Apr 13, 1993
Filed: Oct 8, 1991
Inventors
Nicholas C. Andreadakis
Robert B. Marcus
Assignee (at issue)
Bell Communications Research, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.