Granted Patent
Utility
US 5,201,996 · App. 07/516,173
Patterning method for epitaxial lift-off processing
Inventors:
Thomas J. Gmitter, Eli Yablonovitch
Patented Case
View Patent ↗
Granted: Apr 13, 1993
Filed: Apr 30, 1990
Inventors
Thomas J. Gmitter
Eli Yablonovitch
Assignee (at issue)
Bell Communications Research, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.