Granted Patent
Utility
US 5,202,280 · App. 07/894,938
Method for fabricating a semiconductor device
Inventors:
Satoshi Kamiyama, Yuchiro Numasawa
Patented Case
View Patent ↗
Granted: Apr 13, 1993
Filed: Jun 8, 1992
Inventors
Satoshi Kamiyama
Yuchiro Numasawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.