Granted Patent
Utility
US 5,202,283 · App. 07/656,940
Technique for doping MOCVD grown crystalline materials using free radical transport of the dopant species
Inventors:
Charles R. Younger, Kenneth L. Hess, Stuart Irvine, Edward R. Gertner, Shawn L. Johnston
Patented Case
View Patent ↗
Granted: Apr 13, 1993
Filed: Feb 19, 1991
Inventors
Charles R. Younger
Kenneth L. Hess
Stuart Irvine
Edward R. Gertner
Shawn L. Johnston
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.