Granted Patent
Utility
US 5,202,898 · App. 07/733,646
Laser oscillator, laser resonator, and apparatus for manufacturing of semiconductor
Inventors:
Hiroyuki Sugawara, Toshiharu Shirakura, Takeshi Yamamura, Hideki Yamai
Patented Case
View Patent ↗
Granted: Apr 13, 1993
Filed: Jul 22, 1991
Inventors
Hiroyuki Sugawara
Toshiharu Shirakura
Takeshi Yamamura
Hideki Yamai
Assignees (at issue)
HITACHI, LTD.
Hitachi Engineering Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.