IP Library Granted Patent US 5,204,517
Granted Patent Utility
US 5,204,517 · App. 07/813,865

Method and system for control of a material removal process using spectral emission discrimination

Inventors: Michael C. Cates, Richard R. Hamm, John D. Hoogerwerf
Patented Case View Patent ↗
Granted: Apr 20, 1993 Filed: Dec 24, 1991
Inventors
Michael C. Cates
Richard R. Hamm
John D. Hoogerwerf
Assignee (at issue)
Maxwell Laboratories, Inc.

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Quick Facts
Patent No.
US 5,204,517
App. No.
07/813,865
Filed
1991-12-24
Granted
1993-04-20
Kind
A