Granted Patent
Utility
US 5,205,082 · App. 07/811,568
Wafer polisher head having floating retainer ring
Inventors:
Norm Shendon, Kenneth C. Struven, Robert J. Kolenkow
Patented Case
View Patent ↗
Granted: Apr 27, 1993
Filed: Dec 20, 1991
Inventors
Norm Shendon
Kenneth C. Struven
Robert J. Kolenkow
Assignee (at issue)
Cybeq Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.