Granted Patent
Utility
US 5,206,182 · App. 07/363,000
Trench isolation process
Inventor:
Guy R. Freeman
Patented Case
View Patent ↗
Granted: Apr 27, 1993
Filed: Jun 8, 1989
Inventor
Guy R. Freeman
Assignee (at issue)
UNITED TECHNOLOGIES CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.