IP Library Granted Patent US 5,206,706
Granted Patent Utility
US 5,206,706 · App. 07/723,580

Alignment of an ellipsometer or other optical instrument using a diffraction grating

Inventor: William E. Quinn
Patented Case View Patent ↗
Granted: Apr 27, 1993 Filed: Jul 1, 1991
Inventor
William E. Quinn
Assignee (at issue)
Bell Communications Research, Inc.

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Quick Facts
Patent No.
US 5,206,706
App. No.
07/723,580
Filed
1991-07-01
Granted
1993-04-27
Kind
A