Granted Patent
Utility
US 5,209,402 · App. 07/705,227
Laminar flow gas diffuser
Inventors:
Daniel B. DeBra, William A. Eckes
Patented Case
View Patent ↗
Granted: May 11, 1993
Filed: May 24, 1991
Inventors
Daniel B. DeBra
William A. Eckes
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.