Granted Patent
Utility
US 5,209,816 · App. 07/893,449
Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing
Inventors:
Chris C. Yu, Trung T. Doan, Alan Laulusa
Patented Case
View Patent ↗
Granted: May 11, 1993
Filed: Jun 4, 1992
Inventors
Chris C. Yu
Trung T. Doan
Alan Laulusa
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.