Granted Patent
Utility
US 5,212,425 · App. 07/595,122
Ion implantation and surface processing method and apparatus
Inventors:
Dan M. Goebel, Jesse N. Matossian
Patented Case
View Patent ↗
Granted: May 18, 1993
Filed: Oct 10, 1990
Inventors
Dan M. Goebel
Jesse N. Matossian
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.