Granted Patent
Utility
US 5,213,621 · App. 07/777,821
Halogenated carboxylic acid cleaning agents for fabricating integrated circuits and a process for using the same
Inventors:
John C. Ivankovits, David A. Bohling, David A. Roberts
Patented Case
View Patent ↗
Granted: May 25, 1993
Filed: Oct 11, 1991
Inventors
John C. Ivankovits
David A. Bohling
David A. Roberts
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.