Granted Patent
Utility
US 5,213,622 · App. 07/777,818
Cleaning agents for fabricating integrated circuits and a process for using the same
Inventors:
David A. Bohling, John C. Ivankovits, David A. Roberts
Patented Case
View Patent ↗
Granted: May 25, 1993
Filed: Oct 11, 1991
Inventors
David A. Bohling
John C. Ivankovits
David A. Roberts
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.