Granted Patent
Utility
US 5,213,670 · App. 07/745,957
Method for manufacturing a polycrystalline layer on a substrate
Inventors:
Emmerich Bertagnolli, Herbert Kabza
Patented Case
View Patent ↗
Granted: May 25, 1993
Filed: Aug 9, 1991
Inventors
Emmerich Bertagnolli
Herbert Kabza
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.