Granted Patent
Utility
US 5,213,985 · App. 07/703,909
Temperature measurement in a processing chamber using in-situ monitoring of photoluminescence
Inventors:
Claude J. Sandroff, Francoise S. Sandroff
Patented Case
View Patent ↗
Granted: May 25, 1993
Filed: May 22, 1991
Inventors
Claude J. Sandroff
Francoise S. Sandroff
Assignee (at issue)
Bell Communications Research, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.