Granted Patent
Utility
US 5,215,420 · App. 07/763,183
Substrate handling and processing system
Inventors:
John L. Hughes, Eric C. Lawson
Patented Case
View Patent ↗
Granted: Jun 1, 1993
Filed: Sep 20, 1991
Inventors
John L. Hughes
Eric C. Lawson
Assignee (at issue)
INTEVAC, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.