Granted Patent
Utility
US 5,215,639 · App. 07/671,164
Composite sputtering target structures and process for producing such structures
Inventor:
Donald R. Boys
Patented Case
View Patent ↗
Granted: Jun 1, 1993
Filed: Mar 14, 1991
Inventor
Donald R. Boys
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.