Granted Patent
Utility
US 5,215,856 · App. 07/409,221
Tris-(hydroxyphenyl) lower alkane compounds as sensitivity enhancers for o-quinonediazide containing radiation-sensitive compositions and elements
Inventor:
Tripunithura V. Jayaraman
Patented Case
View Patent ↗
Granted: Jun 1, 1993
Filed: Sep 19, 1989
Inventor
Tripunithura V. Jayaraman
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.