IP Library Granted Patent US 5,215,857
Granted Patent Utility
US 5,215,857 · App. 07/726,140

1,2-quinonediazide containing radiation-sensitive resin composition utilizing methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate or methyl 3-methoxypropionate as the solvent

Inventors: Yoshihiro Hosaka, Ikuo Nozue, Masashige Takatori, Yoshiyuki Harita
Patented Case View Patent ↗
Granted: Jun 1, 1993 Filed: Jul 3, 1991
Inventors
Yoshihiro Hosaka
Ikuo Nozue
Masashige Takatori
Yoshiyuki Harita
Assignee (at issue)
Japan Synthetic Rubber Corporation

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Quick Facts
Patent No.
US 5,215,857
App. No.
07/726,140
Filed
1991-07-03
Granted
1993-06-01
Kind
A