IP Library Granted Patent US 5,217,840
Granted Patent Utility
US 5,217,840 · App. 07/530,545

Image reversal negative working o-quinone diazide and cross-linking compound containing photoresist process with thermal curing treatment and element produced therefrom

Inventors: Mark A. Spak, Donald Mammato, Dana L. Durham, Sangya Jain
Patented Case View Patent ↗
Granted: Jun 8, 1993 Filed: May 25, 1990
Inventors
Mark A. Spak
Donald Mammato
Dana L. Durham
Sangya Jain
Assignee (at issue)
Hoechst Celanese Corporation

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Quick Facts
Patent No.
US 5,217,840
App. No.
07/530,545
Filed
1990-05-25
Granted
1993-06-08
Kind
A