Granted Patent
Utility
US 5,219,701 · App. 07/771,083
Positive photoresist containing 1,2-naphthoquinone-diazide-5-sulfonyl tris ester of 1,3,5-trihydroxybenzene and aromatic hydroxy compound sensitizer
Inventors:
Reinhard Schulz, Horst Munzel
Patented Case
View Patent ↗
Granted: Jun 15, 1993
Filed: Oct 2, 1991
Inventors
Reinhard Schulz
Horst Munzel
Assignee (at issue)
Ciba-Geigy
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.