IP Library Granted Patent US 5,219,713
Granted Patent Utility
US 5,219,713 · App. 07/628,816

Multi-layer photoresist air bridge fabrication method

Inventor: Gerald D. Robinson
Patented Case View Patent ↗
Granted: Jun 15, 1993 Filed: Dec 17, 1990
Inventor
Gerald D. Robinson
Assignee (at issue)
Rockwell International Corporation

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Quick Facts
Patent No.
US 5,219,713
App. No.
07/628,816
Filed
1990-12-17
Granted
1993-06-15
Kind
A