IP Library Granted Patent US 5,221,366
Granted Patent Utility
US 5,221,366 · App. 07/677,918

Etching agents comprising .beta.-diketone and .beta.-ketoimine ligands and a process for using the same

Inventors: David A. Roberts, John C. Ivankovits, John Anthony Thomas Norman, David A. Bohling
Patented Case View Patent ↗
Granted: Jun 22, 1993 Filed: Apr 1, 1991
Inventors
David A. Roberts
John C. Ivankovits
John Anthony Thomas Norman
David A. Bohling
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 5,221,366
App. No.
07/677,918
Filed
1991-04-01
Granted
1993-06-22
Kind
A