Granted Patent
Utility
US 5,221,400 · App. 07/625,397
Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection
Inventors:
Steven E. Staller, David W. DeRoo
Patented Case
View Patent ↗
Granted: Jun 22, 1993
Filed: Dec 11, 1990
Inventors
Steven E. Staller
David W. DeRoo
Assignee (at issue)
DELCO ELECTRONICS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.