Granted Patent
Utility
US 5,221,422 · App. 07/369,714
Lithographic technique using laser scanning for fabrication of electronic components and the like
Inventors:
Shyam C. Das, Jamaluddin Khan
Patented Case
View Patent ↗
Granted: Jun 22, 1993
Filed: Jun 22, 1989
Inventors
Shyam C. Das
Jamaluddin Khan
Assignee (at issue)
Digital Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.