Granted Patent
Utility
US 5,221,556 · App. 07/066,019
Gas injectors for reaction chambers in CVD systems
Inventors:
Mark Hawkins, McDonald Robinson
Patented Case
View Patent ↗
Granted: Jun 22, 1993
Filed: Jun 24, 1987
Inventors
Mark Hawkins
McDonald Robinson
Assignee (at issue)
Epsilon Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.