Granted Patent
Utility
US 5,221,592 · App. 07/847,527
Diazo ester of a benzolactone ring compound and positive photoresist composition and element utilizing the diazo ester
Inventors:
Dinesh N. Khanna, Douglas McKenzie, Chester J. Sobodacha, Ralph R. Dammel
Patented Case
View Patent ↗
Granted: Jun 22, 1993
Filed: Mar 6, 1992
Inventors
Dinesh N. Khanna
Douglas McKenzie
Chester J. Sobodacha
Ralph R. Dammel
Assignee (at issue)
Hoechst Celanese Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.