Granted Patent
Utility
US 5,221,844 · App. 07/837,517
Charged particle beam device
Inventors:
Karel Diederick Van Der Mast, Alan Frank de Jong
Patented Case
View Patent ↗
Granted: Jun 22, 1993
Filed: Feb 18, 1992
Inventors
Karel Diederick Van Der Mast
Alan Frank de Jong
Assignee (at issue)
U.S. Philips Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.