IP Library Granted Patent US 5,225,040
Granted Patent Utility
US 5,225,040 · App. 07/733,522

Process for patterning metal connections in small-geometry semiconductor structures

Inventor: Don R. Rohner
Patented Case View Patent ↗
Granted: Jul 6, 1993 Filed: Jul 22, 1991
Inventor
Don R. Rohner
Assignee (at issue)
Raytheon Company

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Quick Facts
Patent No.
US 5,225,040
App. No.
07/733,522
Filed
1991-07-22
Granted
1993-07-06
Kind
A