Granted Patent
Utility
US 5,225,376 · App. 07/823,038
Polysilicon taper process using spin-on glass
Inventors:
Lloyd W. Feaver, Masanori Sakata
Patented Case
View Patent ↗
Granted: Jul 6, 1993
Filed: Jan 13, 1992
Inventors
Lloyd W. Feaver
Masanori Sakata
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.