Granted Patent
Utility
US 5,229,316 · App. 07/869,614
Semiconductor processing method for forming substrate isolation trenches
Inventors:
Roger Lee, Fernando Gonzalez
Patented Case
View Patent ↗
Granted: Jul 20, 1993
Filed: Apr 16, 1992
Inventors
Roger Lee
Fernando Gonzalez
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.