Granted Patent
Utility
US 5,229,872 · App. 07/822,794
Exposure device including an electrically aligned electronic mask for micropatterning
Inventor:
Peter B. Mumola
Patented Case
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Granted: Jul 20, 1993
Filed: Jan 21, 1992
Inventor
Peter B. Mumola
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.