Granted Patent
Utility
US 5,231,306 · App. 07/828,721
Titanium/aluminum/nitrogen material for semiconductor devices
Inventors:
Scott Meikle, Sung-Cheol Kim, Donald L. Westmoreland
Patented Case
View Patent ↗
Granted: Jul 27, 1993
Filed: Jan 31, 1992
Inventors
Scott Meikle
Sung-Cheol Kim
Donald L. Westmoreland
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.