Granted Patent
Utility
US 5,234,540 · App. 07/876,043
Process for etching oxide films in a sealed photochemical reactor
Inventors:
Robert W. Grant, Kevin J. Torek, Richard Novak, Jerzy Ruzyllo
Patented Case
View Patent ↗
Granted: Aug 10, 1993
Filed: Apr 30, 1992
Inventors
Robert W. Grant
Kevin J. Torek
Richard Novak
Jerzy Ruzyllo
Assignee (at issue)
Submicron Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.