Granted Patent
Utility
US 5,238,532 · App. 07/842,828
Method and apparatus for removal of subsurface damage in semiconductor materials by plasma etching
Inventors:
Charles B. Zarowin, L. David Bollinger
Patented Case
View Patent ↗
Granted: Aug 24, 1993
Filed: Feb 27, 1992
Inventors
Charles B. Zarowin
L. David Bollinger
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.