IP Library Granted Patent US 5,238,775
Granted Patent Utility
US 5,238,775 · App. 07/656,857

Radiation-sensitive resin composition

Inventors: Toru Kajita, Takao Miura, Yoshiji Yumoto, Chozo Okuda
Patented Case View Patent ↗
Granted: Aug 24, 1993 Filed: Feb 19, 1991
Inventors
Toru Kajita
Takao Miura
Yoshiji Yumoto
Chozo Okuda
Assignee (at issue)
Japan Synthetic Rubber Corporation

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Quick Facts
Patent No.
US 5,238,775
App. No.
07/656,857
Filed
1991-02-19
Granted
1993-08-24
Kind
A