Granted Patent
Utility
US 5,238,849 · App. 07/753,065
Method of fabricating semiconductor device
Inventor:
Fumihiko Sato
Patented Case
View Patent ↗
Granted: Aug 24, 1993
Filed: Aug 30, 1991
Inventor
Fumihiko Sato
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.