Granted Patent
Utility
US 5,240,876 · App. 07/891,910
Method of fabricating SOI wafer with SiGe as an etchback film in a BESOI process
Inventors:
Stephen Joseph Gaul, George V. Rouse
Patented Case
View Patent ↗
Granted: Aug 31, 1993
Filed: Jun 1, 1992
Inventors
Stephen Joseph Gaul
George V. Rouse
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.