Granted Patent
Utility
US 5,241,182 · App. 07/982,242
Precision electrostatic lens system and method of manufacture
Inventors:
Noel Martin, Robert L. Gerlach
Patented Case
View Patent ↗
Granted: Aug 31, 1993
Filed: Nov 25, 1992
Inventors
Noel Martin
Robert L. Gerlach
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.