Granted Patent
Utility
US 5,244,694 · App. 07/695,410
Apparatus for improving the reactant gas flow in a reaction chamber
Inventor:
Albert E. Ozias
Patented Case
View Patent ↗
Granted: Sep 14, 1993
Filed: May 3, 1991
Inventor
Albert E. Ozias
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.