Granted Patent
Utility
US 5,250,375 · App. 07/812,585
Photostructuring process
Inventors:
Michael Sebald, Juergen Beck, Rainer Leuschner, Recai Sezi, Siegfried Birkle, Hellmut Ahne, Eberhard Kuehn
Patented Case
View Patent ↗
Granted: Oct 5, 1993
Filed: Dec 20, 1991
Inventors
Michael Sebald
Juergen Beck
Rainer Leuschner
Recai Sezi
Siegfried Birkle
Hellmut Ahne
Eberhard Kuehn
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.