Granted Patent
Utility
US 5,253,266 · App. 07/916,381
MBE effusion source with asymmetrical heaters
Inventors:
Walter S. Knodle, III, Paul Luscher, Barry K. Caffee
Patented Case
View Patent ↗
Granted: Oct 12, 1993
Filed: Jul 20, 1992
Inventors
Walter S. Knodle, III
Paul Luscher
Barry K. Caffee
Assignee (at issue)
INTEVAC, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.